Ion Miling Probes For Thin Film Etching, Laboratory Testing Equipments, Measuring Instruments, Mumbai, India

Hiden IMP Series End Point Detectors

Production Control In Ion beam Etching

Hiden IMP Probes are designed for precise control in Ion Beam Etching applications. Bringing together a high performance quadrupole mass filter, integral electron impact ioniser, compact energy analyser & ion optics for direct analysis of etch process secondary ions; the system provides for routine, user friendly

In-Situ Process Characterisation

The Hiden IMP Probe features Windows™ MASsoft PC software for automatic selelction of the etch products from an internal library of device structures. During the milling process ions with a mass which is characteristic of the material to be etched are monitored. The rapid response to step changes in singal intensity of these ions provides for precise determination of end points & material interfaces. Integration with the production tool then ensures reduced undercutting & overetching, maximised feature control & selectivity, & no incomplete etching. Additionally the probe operates as a residual gas analyser for base pressure analysis, process gas monitoring & leak detection.

The hiden IMP Probe Provides:

Process Control By Application Specific Outputs
Fast identification of device interfaces
Enhanced sensitivity for complex multilayer structures
Auto-Select & recognition of end point species
Contamination resistant design for increased uptime
Process control through machine tool integration
Base pressure residual gas analysis & leak detection

The Hiden IMP Probe features a range of output facilities for termination of etching processes to be accurately & precisely controlled. These include:

Potential free relay contacts
TTL output channels
Serial communication ASCII string
Analog, +/-10 Volt, 12 bit outputs

Multilayered Device Process Monitoring

User-Friendly Software

Hiden's IMP Series operates under the control of Windows™ MASsoft PC software - a powerful, user-friendly package offerng extensive data handling & strogae capabilities, on-board process statistics, networking & communications options, together with a wide range of intelligent trip controls & I/O facilities.

Ion Miling Probes for Thin Film Etching