Triple
Filter Quadrupoles for Precision Analysis in UHV
Science Applications: 3F/PIC Series
• Long term stability
• Enhanced high mass sensitivity
• High abundance sensitivity
• 7 decade continuous dynamic range
• Fast response
• Direct control of mass resolution
• Molybdenum triple-stage mass
filter
HAL-RC
RGA Series Quadrupole Mass Spectrometer
Residual Gas Analysers for Precision Analysis
in Vacuum Diagnostics
• Long term stability
• Enhanced high mass sensitivity
• High abundance sensitivity
• 7 decade continuous dynamic range
• Fast response
• Direct control of mass resolution
• Molybdenum triple-stage mass
filter
/ Residual Gas Analysis
